Business
Thermal Engineering
Advanced heating elements and precision heat‑control technologies for the semiconductor industry.
Driving decarbonization through electric heating for a sustainable future.
Precise thermal control technologies are indispensable in the manufacturing and development of semiconductors, advanced materials, liquid crystal devices, and other cutting‑edge products. The NPR-RIKEN Group—comprising Riken Heat Techno and Shinwa Vanes—has earned strong recognition across diverse industries by applying proprietary thermal control technologies cultivated through decades of experience.
In recent years, we have further strengthened our commitment to sustainability by supporting research and development initiatives aimed at transitioning from combustion‑based heating to electric resistance heating as a means of reducing CO₂ emissions. Through these efforts, we contribute to the realization of a carbon‑neutral society.
Riken Heat Techno offers a portfolio of proprietary heating elements, including the highly durable metallic heating element PYROMAX® and the ceramic heating element PYROMAX SUPER®, which achieves operating temperatures of up to 1800℃. Building on these technologies, Riken Heat Techno designs and manufactures heater units, test furnaces, and industrial furnaces for advanced manufacturing applications.
Shinwa Vanes, leveraging its advanced thermal analysis capabilities, designs and produces customized heater units for semiconductor manufacturing equipment and a wide range of other industrial systems. Through these specialized technologies, Shinwa Vanes responds effectively to the diverse needs of the industrial sector.
Through the development of a diverse range of heater units and industrial furnaces enabled by our proprietary technologies, the NPR-RIKEN Group provides robust support to industries at the forefront of technological innovation and continues to contribute to the creation of a sustainable future.
Topics
Precision Thermal Control Technology Advancing Semiconductor Manufacturing Equipment
Front‑Loading Development Leveraging Analytical Technologies
Carbon-Neutral Shift from Combustion Heating to Electric Heating
Products
A highly durable metallic heating element
made from a proprietary material
developed through our casting research.
A ceramic heating element
rated for temperatures up to 1800 ℃.
We provide customized solutions
covering heating‑element selection,
industrial‑furnace systems,
and plant design.
Used in semiconductor manufacturing
A heater that combines
a heating element and insulation
A highly heat‑resistant tube
Electric Radiant Tube Heater
A unit in which a heating element supported by ceramics is inserted into a heat‑resistant alloy tube.
It can be installed in any orientation within the furnace.
The PYROMAX® PM-D tube offers excellent resistance to high‑temperature deformation and oxidation.
A heater capable of
high power‑density design.
A thin, flexible sheet heater
made of silicone rubber.
A heater that improves heat‑transfer
efficiency by ensuring surface contact
with the workpiece.
A perimeter‑mounted heater
that uses mica insulation
and is encased in metal plates.
A flat‑surface heater
using mica insulation
and is encased in metal plates.
A heater in which a heating element
and insulating powder
are sealed inside a metal sheath.
Technology
Front‑Loading Development Leveraging CAE Technology
■Early Issue Identification and Optimal Design Through Simulation
In our heater development process, we implement front‑loading by applying CAE (Computer Aided Engineering) from the earliest design stages.
This approach enables the early identification and resolution of issues, reducing the number of prototype iterations, shortening development cycles, and improving design stability and quality.
By utilizing simulation, we can propose optimal solutions for complex heater requirements—such as heating rate, temperature uniformity, insulation design, and environmental considerations (avoiding over‑specification).
■Achieving Even Higher Precision with Our Proprietary Calculation Tools
By integrating our internally developed thermal calculation tools with CAE, we achieve a hybrid analysis approach that enables rapid and reliable evaluations.
This hybrid approach shortens design time and supports highly reliable decisions from the earliest design stages, further enhancing front‑loading in the development process.
Contributing to Carbon Neutrality Through Electric Heating
■Retrofitting Existing Combustion Furnaces to Electric Heating
Switching from fossil‑fuel combustion heating to electric radiant‑tube heaters enables a retrofit pathway that significantly reduces CO₂ emissions and contributes to carbon neutrality.
CONTACT
For PYROMAX® heating elements and industrial furnaces
Riken Heat Techno CO., LTD.Official Website
For Heater Units
SHINWA VANES CO., LTD.Official Website
